ࡱ> MO{ z [ Rbjbjp ΐΐ(%#%#######8 $\e%D#GHp%%%%%'''VGXGXGXGXGXGXG$IYL`|G]#*'"'**|G%#%#%%G2j@j@j@*%#l%#%VGj@*VGj@j@#,j@%#-Ȝ#r;Pj@BG H<GHj@L=Lj@j@ L#vA'Z#(@j@c(4('''|G|GL?'''GH****L''''''''' !: WёyvV[6qyf[WёNEA GaAlAs/GaAsؚHewzzIQ5ulbchVNt'`NSc6RY 91433108 pkp[GaN4gIQ5uS\'`vq_T Ng0٘1 N0z2 8^,g^3 (1.FUN^f[b5uP[5ul] zf[b lWSFUN 4760002.FUNLNb/gf[b:g5u| lWSFUN 4760003.WSNt]'Yf[5uP[] zNIQ5ub/gf[b _lςWSN 210094) Xd pkp NFOSN'Yϑ0WQ\GaN4g7hT-NvTy:wT[u5u[ 9eUPgev~vf^\'` NSN9eU7hTvhb(ϑ [cؚ7hTvIQ1T^/fNy gRvKbk0[GaN4g7hTۏLN N T)n^0 N TevkpYt O7hTv'`_0RN9eU gOagN N7hTvf5uAmN:N200pA 5u;sN:N1.6 .cm g'YIQ1T^:N0.19A/W0OncIQ1T^\O:Nċ0OhQ SN_Q Ǒ(u700!pkp10min6RYQv4gwQ gfؚvIQ5uS\'` N [sNGaNIQ5u4gvOS6RY]z0 sQ.͋.lSSIQ5u4gIQ5uS\kpIQ1T^ -NVR{|SO433TN205 e.shƋxA Effects of thermal annealing on the photoemission performance of GaN photocathode Li Biao1, Ren Yi2, Chang Benkang3 (1.School of Electronic and Electrical Engineering, Shangqiu Normal University, Henan Shangqiu, 476000, China;2.Department of Electrical and Mechanical Engineering, Shangqiu Polytechnic, Henan Shangqiu, 476000, China;3.Institute of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Jiangsu Nanjing, 210094, China) Abstract: Thermal annealing can greatly reduce the defects and parasitic capacitance in GaN photocathode, and can improve the crystalline properties and the morphologies of the sample. It is a powerful means to improve the responsiveness of the sample. The GaN photocathode sample was annealed at various temperatures and at various time periods in order to improve the performance of the sample. The ideal experimental data for the sample are as follows: the minimum dark current is only 200pA, the minimum resistivity is only 1.6 .cm, and the maximum responsivity is 0.19A/W. It can be concluded that the GaN photocathode sample annealed by 700 ! for 10 min has higher photoemission performance. Key words: GaN; photocathode; photoemission; thermal annealing; spectral response EEACC: 4250 0 _ GaNWPge:Nvc&^N&^S wQ g[y&^0NON5u8^pe0ؚ)n0P0b\TSf[3z['`}YI{YOoyr'` O_GaNWJS[SOhVN(W+}YcKmSIQX[PI{W>fsQg'Yv\oR[1-4]0яt^eg +}YcKmWenibU\ ScKmv+}YIQN,__1_ VdkBl+}YcKmhVwQ gؚvIQ5ulbcR0IQ5u4g\O:N+}YwzzcKmhVv8h_N /fQ[hVNteSO'`vsQ.V }0GaNPgeOovQ(W^\'` O GaNIQ5u4gb:Nt`v+}YIQ5u4g NCsITCs2TeI{ O~+}YIQ5u4gvk wQ gϑP[Hesؚ0evT^0*bbkpup;mST[IQ1T^I{Op [vQsg'Y0WcؚNwzz+}YcKmhVNvϑP[Hes %_eNCsI0Cs2TeI{IQ5u4g+}YT^lkv N OvQb:Nn_1_+}YcKmBlveW+}YIQ5u4g YUO6RYQ[}T0ؚupOe^T:_3z['`veW+}YIQ5u4gNv/fcKmWvxvzpp[5-8]0 vMR GaNIQ5u4gv6RYN,Ǒ(u N*Nek1)PgeuSpWcBg2)_SP[~nmhb3))R(uCsI{NO8QRCQ }[GaNhbB\ۏLo;m0vQ-N MR$N*NsTpkpo`o`vsQ NakamuraI{)R(upkpo;mMgBg( [sNpWGaN[9]Sf[nmTvRpkp]z/f(uvGaNhbnm]z ProixI{[10]:Npkphbnm]z NNSSdPgehbvalgB\ Te_NS(WN[ z^ NtePgehb~g O6RYQvIQ5u4gupOe^fؚ0SN ؚ)npkp/f6RYGaNIQ5u4g_ NS\vs0ؚ)npYt NFOSN[Pge~vf^\'` gf>f9eU[11] SNNue^RvvfSO[12] Npkp[hbb__N gf>fv9eU kpSN9eU7hTvhb(ϑ[13]0,ge[GaN4g7hTۏLN N T)n^0 N TevkpYt Ng~b0RO7hT'`_0R9eUv4NLuagNSv^Spe :NGaNIQ5u4gv6RYcOOS]z0 1 [NKmՋ [7hT~gYV1@b:y 7hTǑ(u݄[wl^ AlNQB\ MgcBgT150 nm S^vGaNIQ5uS\B\0  EMBED Visio.Drawing.11  V1 GaNIQ5u4g7hT~g:yaV Fig. 1 The structure of GaN photocathode sample 1.1 N T)n^ NvkpYt  V2 GaNIQ5u4g7hT(W N T)n^kp10 minvI-Vyr'`KmՋf~ Fig. 2 I-V characteristic of GaN photocathode sample was annealed at various temperatures for 10 min (WN2ll N 7hT(W500!0600!0700!T800!kp10 min vQI-VKmՋf~YV2@b:y b[)n(RT)agN NvKmՋ~g_NnNvQ-N N\Ok[14]0 SN w0R (Wkp)n^:N700!e hVNvf5uAmg\ N:N200 pA0 (WN2ll N [7hT(W0!0200!0400!0500!0600!0700!0800!0900!T1000!ۏLkpYt vQ5u;sKmՋf~YV3@b:y[9]0  V3 cMg GaNIQ5u4g7hT(W N T)n^ NkpTv5u;sKmՋf~ Fig. 3 Resistivity of GaN:Mg after annealing at various temperatures SN wQ ؚ;TNO;lSv4NLu)n^:N700!0 1.2 N TekvkpYt [7hTR+RۏLN5min010 min030 minT60 min 700!agN Nvkp KmՋf~YV4@b:y[14]0  V4 GaNIQ5u4g7hT700!agN N N TkpevI-Vyr'`KmՋf~ Fig. 4 I-V characteristic of GaN photocathode was annealed for various time periods under 700! SN w0R kpe:N10 mine hVNvf5uAmg\ ~:N200 pA0 1.3 IQ1T^KmՋ (W500!T700!pkp10 minT[7hTvIQ1T^ۏLNKmՋ KmՋ~gYV5@b:y [)nSYKmՋ~g_NnNV-N N\Ok[14]0  V5kp)n^:N500!T700! S[)n(RT)agN NGaNIQ5u4g7hTvIQ1T^KmՋf~ Fig. 5 Spectral response of GaN photocathode annealing at 500!, 700! and room temperature SN wQ (W700!agN N (Wl:N362 nmY 7hTvIQ1T^upOe^g'Y :N0.19 A/W0 2 NRg 2.1 kp)n^[7hT~vf^\'`vq_T f5uAm/fchVN(WSOPSagN N l geQ\IQgqeNuvSTvAm5uAm N,/f1u}AmP[vibceNubhVNhbTQ萄v:wNS g[vBg(_w SbvfSOPgehb:wb_bvlo5uAm0}AmP[pibceb_bv,g_f5uAmTBg(N:wb_bv YT5uAm0(WJS[SOhVNQ N T:SW}AmP[vSm^]Ob_bibce5uAmhVNhbTQ萄v:wOw0R YT-N_v\O(u [OO5uP[Tzztz(W:w~ NۏL YT 5uP[Tzztz YTev[TyRb_b YT5uAm g[Bg((WhVN-N_NSw0R YT-N_v\O(u T7h_NOb_b YT5uAm0 S_vkp)n^ NFOSN'Yϑ0WQ\GaN4g7hT-NvTy:wT[u5u[[11] Npkp[hbb__N gf>fv9eU kpSN9eU7hTvhb(ϑ[13] MNOPgehbTSOQv:wTMO[^ b_bNOvSOho5uAm0SOQo5uAmT YT5uAm 0RQ\hVNf5uAmvvv vQ,g(SV/fpkp9eUNPgev~vf^\'` hs:NY(Wvf5uAmMNO[15]0 Y[ZZb6RYvA10.25Ga0.75NhVN(W500~800! NNN2ll-Nkp10min kp~gYV6@b:y0SN wQ700!kpNuvf5uAmg\[16] 勋N[^/f,g[g}YvPO0  V6 Al0.25Ga0.75N+}YcKmhV(W N T)n^kp10 minvI-Vyr'`KmՋf~ Fig. 6 I-V characteristic of Al0.25Ga0.75N ultraviolet detector was annealed at various temperatures for 10 min 2.2 cMg GaNPgevpWS GaNPge}6qN1928t^]JohnsonI{Tb[17] FOvQT_NkeQv^*g[(uS SVKNN1\/fGaNPgevpWcBgN[s0pWcBgBR(Mgg8^(u)[eQGaNPgeTv^l gNupW[5u /fNuNePvGaNؚ;Pge SucMgvGaN1uNHS Nw0RS;Nv\O(u0v0R1989t^ AmanoI{SscMgTvGaN(W~ǏNO5uP[_g\TSNlS:NpWJS[SO[18]1991t^ NakamuraN5uP[_ggq\cMgv GaN Ssvfb)n^'YE^ NGS 1udk`upWSSN)n^ gsQ N/f(WwzzbN2ll-N )R(u400!N NvpkpYtcMgv GaN _0RNNO;pWGaN(O5u;1u106 .cm NM0R2 .cm)[9]0ǏpkpYt SOte*NY^B\pWS^8^GWS 5uP[_ggq\tSNOvfb N1mvVQpWS hbGWS QtS NGWS YtHeg NsO v^NǏkpYtpWSv6R zfR{S0 (WSucMgvGaN-N MgS;N/fHSP[@bS O[Mg-Hb_b YBgvSTir NO5uP[_ggqb-N)nkpvϑ S4xOWMg-H~TSO o;mS;N OMgSP[ۏeQ0RGaSP[MOn NupW[5u:gg [spWcBg NuNO;vpWGaN dk:NHSP[SMgveP:gt[19,20]0HvS\O(u SSV7vpYt[~g0  V7 N Tll NvcMg-GaNkp5u;svSSf~ Fig. 7 Resistivity of GaN:Mg after annealing at various atmospheres NH3ll-Nkpb_bvؚ;p-GaN Q~ǏN2llkpYt pSM0R26 .cm]SvNO; f600!N Nkp lSONH3bN2SOp(WؚNOKNSSS S SucMg-GaNhsQؚ;b^NNH3 gsQ01uNNH3(W400!]SR bSP[H(WGaNhbSm^_ؚ [hQSNǏibceۏeQGaNPgeQ ۏ b_bMg-H~Tir OS;N^;m'`S V HTsؚ;b0Yg(WN2ll-N400!N Npkp Mg-H.Sb_ Mg͑e;mS R5u;sv^SNO0 2.3 kpYt[7hTIQ1T^vq_T 4gPgeS\B\vu(ϑ[IQ5uP[Thbibce g͑q_T ؚSm^cBgT_(Y^(SV1)[GaNY^QX[(W'YϑvzzMObMOI{:w S_eQ\IQgq\(W4ghb (WS\B\hbN[S^VQ(IQP[ gHe8T6e:S)8T6ev^oSQIQ5uP[ 6qTIQ5uP[(WS\B\QNibceb__ЏR 1uNS\B\Q:wb_bv YT-N_OOIQ5uP[ЏR0RPgehbKNMROOv^ YTm1Y MNON4gIQ5uP[S\'` OIQ1T^^S\0_N1\/f :wvX[(WO'Y'YMNOIQ5uhVNv'` ǏkpYtRSN'YE^^Q\:w cؚ7hTv~vf^\'` N 0RcؚhVNIQ5uS\'`vvv sSkpYtScؚ7hTvIQ1T^(SV5)0:wbMO[^[IQ1T^vq_T_NSNAllen[21]b\gSftfI{[22]v[~gRNPO YV80V9@b:y TLub YTsSv'Y h:yTLubY:wY IQ5uP[ YTvQs_N1\'Y Y(Whs:N4gupOe^NO SKN TLub YTsSv\ RLubYv:w_N1\\ )RNIQ5uS\0  V8 IQ5u4gupOe^Lub YTsvSSf~ Fig. 8 The sensitivity of photocathode versus different Svs  V9 TLub YTs[\_GaAsIQ5u4gϑP[Hesvq_T ( P=0.4,  bfhrtv    ( . 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Study of GaAs photocathode with high performance[D]. 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% % % TOVkt@9v@OWLahhphotocathode, ,,,,'',,+'% % % T|Wkt@9v@WWLah\and can '+,'',% % % T A kt@9v@W#Lahimprove the crystalline properties C,,+',''*"',',,,''"% % % TB Z kt@9v@B WLahxand the morphologies ',,,'C,,,,,,'"% % % T[ 8kt@9v@[ W Lahhof the sample,+'"'C,'% % % T9kt@9v@9WLaht. It is a powerful "',,?', % % % TpOK.&" WMFC LLt@9v@OLahXmeans C'',"% % % TL.t@9v@L!Lahto improve the responsiveness of ,C,-+',''",+,"+','"",% % % T  .t@9v@  Lah`the sample,'"'C,'% % % TX  .t@9v@ LahP. % % % TT .t@9v@ ,LahThe GaN photocathode sample was annealed at 6+'@&?,,,,&',,,&"'C,'?'"',,&'','% % % Tx.t@9v@Lah\various+',,!% % % TT.t@9v@LahP  % % % TOMt@9v@OLahttemperatures and at 'C,'','"*',,*'*% % % TdNt@9v@NLahTvari+'% % % T`Nt@9v@LahTous,,"% % % TTOxt@9v@OLahP *% % % Tyt@9v@yLahhtime periods iC'*,',,"*% % % Tlt@9v@0Lahn order to improve the performance of the sample,*,,'*,)C,-+'*,'*,',C',''*,*,'*"'C,'% % % Tt@9v@ Lahd. The ideal *6,'*,'& % % % T OQt@9v@O Lahexperimental data for the sample',,'C','&,''&,&,&&"'C,'% % % TTQ-t@9v@LahP &% % % T.Qq t@9v@.Lahlare as follows: ''&'"&,,?"&% % % Tdr Q t@9v@r LahTthe ,'%% % % T| Qz t@9v@ Lah\minimum C,C-C&% % % T { Q5t@9v@{  Lahdark current is only 200pA, the ,',&',',&"&+,*&,,,,?&,&&% % % T|6Qt@9v@6Lah\minimum C,C-B% % %  % % % TOwt@9v@OcLahxresistivity is only 1'""++#"",,+",% % % TXQwt@9v@cLahP.6,% % % TTRswt@9v@RcLahP "% % % tcRp @Times New Roman<RQLb $$QLb IdW <dWXG*Ax Times ew omanE8W#$PCWFwPzWFw,dv% %  Tt wt@9v@tcLahx.cm, and the maximum A'C"',,",'"C',C-C" % ( % % % T  wt@9v@ c Lahdresponsivity'",,,"++% % % TT  wt@9v@ cLahP #% % % Tx  wt@9v@ cLah\is 0.19"",,,% % % TX = wt@9v@ cLahPA/@% % % T`=  wt@9v@= cLahTW. K"% % % T wt@9v@ c"LahIt can be concluded that the GaN "'',",'"',,',,',",'",'"?&?,+ % % % T$O;t@9v@O'$Lahphotocathode sample annealed by 700 ,,,,'',,+'"'C,'',,''',,*,,,% % % TT2t@9v@'LahP!X% % % TT ;t@9v@'LahP % % % Th ;t@9v@ '/Lahfor 10 min has higher photoemission performance,,,C,,'",,,',,,,'C"",,,',C',''% % % TT;t@9v@'LahP.% % % TT!;t@9v@'LahP ,% % % TT"l;t@9v@"'LahP K % % % T`t@9v@LahTKey>(+% % % TTt@9v@LahP % % % Tpt@9v@LahXwords:?,,"&nWMFCLL% % % TTt@9v@LahP % % % Tt@9v@LahtGaN; photocathode; @'@,+,,''+,,'% % % T t@9v@Lahlphotoemission; ,,,,'C"",,% % % T ! t@9v@ Lahpthermal annealing,'C'',,'',,% % % T" t@9v@" Laht; spectral response",''''",,,"&% % % TTt@9v@LahP K % % % Tl]t@9v@LahXEEACC65?;;% % % Tp]t@9v@LahX: 4250,+,+% % % TT]At@9v@LahP K% % % % % %  TXO${t@9v@OpLahP0 ,,TX$V{t@9v@pLahP_XXTTW${t@9v@WpLahP K % % % T`>t@9v@3LahTGaN,,BTD>t@9v@3)LahWPge:Nvc&^N&^S wQ g[y&^0NON5u8^pe0ؚ)n0P0b\TSf[3zWXWXWXWXWXXWXSXWXWXSXXWXWTWXXSWXXSXWXWXWW% % 6h6ah6a66g6`g6`66f6_f6_66e6^e6^66d6]d6]66c6\c6\66b6[b6[66a6Za6Z66`6Y`6Y6 6 _6X_6X 6  6 ^6W^6W 6  6 ]6V]6V 6  6 \6U\6U 6  6 [6T[6T 6 6Z6SZ6S66Y6RY6R66X6QX6Q66W6PW6P66V6OV6O6  JT."System??F?m?F?F?F-----@Times New Roman------------  2 /TJ1--- 2 3TJ ,JT'------------2 HG TJĿ ---&2 HxTJȻѧ "2 HTJNEA GaAlAs/GaAsG2 H"(TJЧչתɿƱ 2 HTJ91 2 HTJ42 HTJ331080 2 HTJ ------2 eTJ2 eTJ˻2 eTJGaN0  ,2 e TJ緢ܵӰ 2 eTJ ---------------2 TJ 2 TJ 2 TJ --- 2 yTJ1---2 TJ 2 )TJ 2 3TJ--- 2 yATJ2---2 CTJ --- 2 ypTJ3--- 2 sTJ 2 LTJ(1.02 \ TJʦѧԺ 2 TJ 2 TJ 2 TJ 2 TJѧԺ 2 TJ 2 TJ 2 $TJ 2 .TJ4760002 NTJ 2 XTJ2./2 cTJְҵѧԺϵ 2 TJ 2 TJ 2 TJ 2 TJ ---2 TJ4760002 TJ 2 TJ3.A2 $TJϾѧӹ缼ѧԺ 2 }TJ 2 TJϾ 2 TJ 2 TJ210094 2 TJ)--- 2 TJ ---2 \TJժ 2 gTJ 2 lTJҪ /2 ~TJ˻𲻵Դؼ 2 TJGaN02 TJ S2 &0TJƷеĸȱݺͼݣƲϵĽᾧԣ  G2 G(TJҿԸƷıƷ  2 TJӦ 2 A TJһ 2 uTJֶΡ 2 TJ 2 TJGaN0&2 TJƷ˲ͬ }2 GLTJ¶ȡͬʱ˻ʹƷܵõ˸ƣƷİΪ 2 TJ200pA42 TJ 2 GTJΪ  2 `TJ12 eTJ.6 p2 uTJ.cm 2 TJ 2 TJӦ 2 TJΪ2 TJ0.19A/W 2  TJ 2 TJ 2 +TJӦ 52 UTJΪ׼Եó 2 TJ70092 TJ 2 TJ 2 TJ 2 #GTJ 2 #TTJ10min/2 #qTJƱ J2 #*TJиߵĹ緢ܣӶʵ 2 #eTJGaNi/2 #xTJŻƱա 2 #TJ 22 :\TJؼʣأ 2 : TJ緢䣻 2 :TJ˻𣻹Ӧ 2 :bTJ ------2 Q\ TJͼţ 2 QTJO4332 QTJ 2 QTJTN205/ 2 QTJ --- 2 QTJ 2 QTJ 2 QTJ 2 Q TJױʶ룺 --- 2 Q9TJA 2 Q>TJ ---@Times New Roman------------A2 n\$TJEffects of thermal annealing on the  ---2 n1TJphoto/---52 nSTJemission performance of GaN     ---2  TJphotocathode--- 2 YTJ @Times New Roman- - - - - - @Times New Roman- - - - - - - - - - - - - - - - - - 2 TJLi Biao - - - 2 TJ1- - - 2  TJ, Ren Yi- - - 2 ,TJ2- - - "2 /TJ, Chang Benkang- - - 2 xTJ3- - - 2 {TJ - - - 2 NhTJ(1.School of Electronic and Electrical Engineering, Shangqiu Normal University, Henan Shangqiu, 476000, - - - 2 VMTJChina;2.Department of Electrical and Mechanical Engineering, Shangqiu Polytec - - - ,2 TJhnic, Henan Shangqiu, - - - 2 PiTJ476000, China;3.Institute of Electronic Engineering and Optoelectronic Technology, Nanjing University of - - - ^2 7TJScience and Technology, Jiangsu Nanjing, 210094, China)--- 2 TJ - - - 2 \ TJAbstract:- - - 2 TJ - - - j2 ?TJThermal annealing can greatly reduce the defects and parasitic - - - (2 TJcapacitance in GaN u- - - 2 3GTJphotocathode, - - - 2 3TJand can - - - @2 3#TJimprove the crystalline properties - - - +2 3;TJand the morphologies - - - 2 3 TJof the sample - - - (2 3TJ. It is a powerful s- - - 2 KGTJmeans - - - =2 Ke!TJto improve the responsiveness of s- - - 2 K TJthe sample- - - 2 K%TJ. - - - M2 K+,TJThe GaN photocathode sample was annealed at - - - 2 KTJvarious - - - 2 KTJ - - - )2 bGTJtemperatures and at - - - 2 bTJvari- - - 2 bTJousi- - - 2 bTJ - - - 2 bTJtime periods i- - - S2 b0TJn order to improve the performance of the sample- - - 2 b TJ. The ideal - - - ;2 zG TJexperimental data for the sample- - - 2 zTJ - - - #2 zTJare as follows: - - - 2 z"TJthe - - - 2 z4TJminimum - - - ;2 za TJdark current is only 200pA, the - - - 2 zTJminimum - - - - - - +2 GTJresistivity is only 1- - - 2 TJ.6- - - 2 TJ - - - @Times New Roman- - .,2 TJ.cm, and the maximum .-  - - - 2  TJresponsivity- - - 2 LTJ - - - 2 PTJis 0.19 - - - 2 nTJA/- - - 2 xTJW. 0 - - - >2 "TJIt can be concluded that the GaN - - - A2 G$TJphotocathode sample annealed by 700 ---2 TJ - - - 2 TJ - - - R2 /TJfor 10 min has higher photoemission performancee- - - 2 TJ.- - - 2 TJ - - - 2 TJ - - - 2 \TJKey0- - - 2 mTJ - - - 2 pTJwords:- - - 2 TJ - - - (2 TJGaN; photocathode; - - - "2 TJphotoemission; - - - %2 )TJthermal annealing;- - - (2 uTJ; spectral response- - - 2 TJ - - - 2 \TJEEACC:- - - 2 ~TJ: 4250- - - 2 TJ ------2 GTJ0 2 RTJ 2 gTJ ---2 \TJGaN22 nRTJΪֱӴ϶Ҵ϶ɵпͽ糣͸¡͸ʴͻѧ --JJTTJJSSJJSSJJSSIISSIISSIISSIISSIISSIIRRIIRRIIRRHHRRHHRRHHRRHHRRHHRRHHRRHHQQb2 2 0@P`p2( 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p8XV~PJ_HmH nHsH tHJ`J cke $1$a$ CJKH_HaJmH nHsH tH\2\  \h 3$dd1$@&[$\$a$5CJKHOJQJ\^JaJVV /h 4$$dx"@&5CJOJPJQJ\aJ$A`$ ؞k=W[SOBiB nfh\l_(uH*(UA( \c >*phR \"reader-word-layer reader-word-s1-1$dd1$[$\$a$CJKHOJQJ^Jb \"reader-word-layer reader-word-s1-4$dd1$[$\$a$CJKHOJQJ^Jr \"reader-word-layer reader-word-s1-6$dd1$[$\$a$CJKHOJQJ^J \"reader-word-layer reader-word-s1-8$dd1$[$\$a$CJKHOJQJ^J \"reader-word-layer reader-word-s1-5$dd1$[$\$a$CJKHOJQJ^J \#reader-word-layer reader-word-s1-10$dd1$[$\$a$CJKHOJQJ^J \#reader-word-layer reader-word-s1-11$dd1$[$\$a$CJKHOJQJ^J \3reader-word-layer reader-word-s1-3 reader-word-s1-7$dd1$[$\$a$CJKHOJQJ^J \#reader-word-layer reader-word-s1-12$dd1$[$\$a$CJKHOJQJ^J Z'"reader-word-layer reader-word-s1-2$dd1$[$\$a$CJKHOJQJ^J Z'"reader-word-layer reader-word-s1-7$dd1$[$\$a$CJKHOJQJ^J Z'"reader-word-layer reader-word-s1-9 $dd1$[$\$a$CJKHOJQJ^J Z'#reader-word-layer reader-word-s1-14!$dd1$[$\$a$CJKHOJQJ^J" Z'#reader-word-layer reader-word-s1-15"$dd1$[$\$a$CJKHOJQJ^J2 Z'#reader-word-layer reader-word-s1-16#$dd1$[$\$a$CJKHOJQJ^JB Z'#reader-word-layer reader-word-s1-17$$dd1$[$\$a$CJKHOJQJ^JR Z'#reader-word-layer reader-word-s1-18%$dd1$[$\$a$CJKHOJQJ^Jb Z'#reader-word-layer reader-word-s1-19&$dd1$[$\$a$CJKHOJQJ^Jr Z'#reader-word-layer reader-word-s1-20'$dd1$[$\$a$CJKHOJQJ^J Z'4reader-word-layer reader-word-s1-4 reader-word-s1-13($dd1$[$\$a$CJKHOJQJ^JDD 9!GFbJThe)$1$9DH$a$ CJKHaJdd /&entryauthor normal hlfld-contribauthor"" /commaBB /apple-converted-spaced^d _nf(Qz)-$dhdd1$[$\$a$B*CJKHOJQJ^JphXX _abstract.$dd1$[$\$a$CJKHOJQJ^JRR _label/$dd1$[$\$a$CJKHOJQJ^J`` _ publish_text0$dd1$[$\$a$CJKHOJQJ^JVV _kw_main1$dd1$[$\$a$CJKHOJQJ^JPK![Content_Types].xmlj0Eжr(΢Iw},-j4 wP-t#bΙ{UTU^hd}㨫)*1P' ^W0)T9<l#$yi};~@(Hu* Dנz/0ǰ $ X3aZ,D0j~3߶b~i>3\`?/[G\!-Rk.sԻ..a濭?PK!֧6 _rels/.relsj0 }Q%v/C/}(h"O = C?hv=Ʌ%[xp{۵_Pѣ<1H0ORBdJE4b$q_6LR7`0̞O,En7Lib/SeеPK!kytheme/theme/themeManager.xml M @}w7c(EbˮCAǠҟ7՛K Y, e.|,H,lxɴIsQ}#Ր ֵ+!,^$j=GW)E+& 8PK!mQtheme/theme/theme1.xmlYMoE#F{oc'vGuرhF[x=ޝzvg53NjHHzZ $ʯI)*E_N&IA!>Ǽ3xN>UWL0Č߫߿z}rx{h9T8T/χ?xY'~3S~O_|w)ӈHt=a+d NG1-RlƁ1RJwT蠯M1K"o he˓ێ½PL-|%EhY7'qP.\L=dqķ3Iofi.ñBRb-JP_pG ݢiKtdӌhFio7;7Q2ȾD>a/Q>XW ˔M_uHq)h +:Viw4rBqϫ"r!2laCbU|!8^8>ܠ,AбVt׎~ls14_=,ɬožTV G"ѦbH'.4x޵w-ϷE|F;v`b3"G 'e\fHO '$i_wp >*8i&LY%\,xҕ= r6f 3Tʅ):ªZKLs&C Mܛ0 [˫p@ע`j۽7 YHxHicT5Ar@HZAZC}i' RQ\m,zo,gQu{Y\,Nר/=L _.̇Y7C6-fSh62"5NHT[X65̫4X%Yֳ2fkhi~tCKF#b +w1m|4`!:U!p5a:~{4mmio ήc8mDJpSǹ橠V1?#Si?3E'pS2W`qB]( 08w nA[s)k8= Aa?R dڒɾcUӽ˲d)#Queb}C!&i0>4S7{z F} 4sKvUKoȳh~1jYUVH5U8Vk;֜L9ŰD ?*|FL "A3>g]dm2iVֵ褽mg (( j @ 0 XBb!8#%%')+,./f081 hh*jNl,oqs"uvyfz.|r~Ѓ@!#$%&()*+,-.0123FGHIKLMNOPQRSTUVXYZ\]B+jl8< "'/JW[! ; = (: !t    ,R$KsKkAni8F 8@H 0(   (  b   C ANg٘#" `?B S  ?'( tu Tzb䌬 {b |b$ }b䎬 ~bd b J L](N$Pa(<*urn:schemas-microsoft-com:office:smarttagschmetcnv Z 012.53400700!FalseHasSpacemNegative NumberType SourceValueTCSCUnitName                      1:;>ALMNQSVZ_eyz|FJ36 2`RWXY\_oqvw{}> A b f q u       ? @ B E i l   ( ) - . 2 3 7 9 ? 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